Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10240235 | Method and apparatus for depositing a material layer originating from process gas on a substrate wafer | Georg Brenninger, Alois Aigner | 2019-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10240235 | Method and apparatus for depositing a material layer originating from process gas on a substrate wafer | Georg Brenninger, Alois Aigner | 2019-03-26 |