Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10240230 | Process and method for in-situ dry cleaning of thin film deposition reactors and thin film layers | — | 2019-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10240230 | Process and method for in-situ dry cleaning of thin film deposition reactors and thin film layers | — | 2019-03-26 |