Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480974 | Composite MEMS flow sensor on silicon-on-insulator device and method of making the same | Chih-Chang Chen | 2019-11-19 |
| 10240723 | Digital regulated gas dispensing apparatus with a MEMS mass flow meter | Chih-Chang Chen | 2019-03-26 |
| 10209156 | Micromachined pressure sensor and method of making the same | Chih-Chang Chen | 2019-02-19 |