Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216084 | Sulfonic acid derivative, photoacid generator using same, resist composition, and device manufacturing method | Yoshiyuki Utsumi, Noriaki Kobayashi | 2019-02-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216084 | Sulfonic acid derivative, photoacid generator using same, resist composition, and device manufacturing method | Yoshiyuki Utsumi, Noriaki Kobayashi | 2019-02-26 |