Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460947 | Method for polishing silicon wafer | Hiromasa Hashimoto, Kei Fujiyama | 2019-10-29 |
| 10335918 | Workpiece processing apparatus | Taichi Yasuda | 2019-07-02 |
| 10293460 | Method of producing polishing head and polishing apparatus | Hiromasa Hashimoto, Yasuharu Ariga, Takahiro Matsuda | 2019-05-21 |