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Tetsuya Tsubokawa

SH Shimadzu: 3 patents #22 of 300Top 8%
Overall (2019): #66,050 of 560,194Top 15%
3
Patents 2019

Issued Patents 2019

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10415577 Deposition substance monitoring device and vacuum pump 2019-09-17
10267337 Vacuum pump and method of manufacturing vacuum pump 2019-04-23
10221863 Vacuum pump 2019-03-05