Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504696 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Osamu Iizuka | 2019-12-10 |
| 10497539 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Osamu Iizuka | 2019-12-03 |
| 10483088 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Osamu Iizuka | 2019-11-19 |
| 10211027 | Method for measuring resolution of charged particle beam and charged particle beam drawing apparatus | — | 2019-02-19 |