Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345720 | Photolithography tool and method for compensating for surface deformation in carrier of photolithography tool | Feihong Liao, Fuqiang YANG | 2019-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345720 | Photolithography tool and method for compensating for surface deformation in carrier of photolithography tool | Feihong Liao, Fuqiang YANG | 2019-07-09 |