Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468283 | Ion implantation apparatus and method for processing plurality of wafers using the same | Shinji Ebisu, Yoshito Fujii | 2019-11-05 |
| 10364841 | Linear motion guide device and end cap for linear motion guide device | — | 2019-07-30 |