Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10471457 | Inspection unit, inspection method, and substrate treating apparatus including the same | Keunhwa Yang, Kihoon Choi, Kwangsup Kim | 2019-11-12 |
| 10357806 | Substrate treating apparatus and method | Jong Han Kim, Yu Hwan Kim, Edwin Lee, Seong-soo Lee | 2019-07-23 |
| 10211074 | Substrate treating apparatus and treatment liquid nozzle | Kihoon Choi, Hyeon Jun Lee | 2019-02-19 |
| 10186419 | Method for treating a substrate with a shock wave | Kihoon Choi, In-Il JUNG, Seong-Soo Kim | 2019-01-22 |