Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453672 | Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate | Byungsun Bang, Kilsung KWON | 2019-10-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453672 | Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate | Byungsun Bang, Kilsung KWON | 2019-10-22 |