Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446429 | Apparatus and method for treating substrate | — | 2019-10-15 |
| 10388550 | Method for detecting the center of substrate, method for transporting a substrate, transporting unit and apparatus for treating a substrate including the unit | Hyun Jun Kim | 2019-08-20 |