Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290521 | Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Hiromichi Nagashima | 2019-05-14 |
| 10216099 | Substrate processing apparatus | Kazuhiro Nishimura, Yasushi Nakamura, Ryuichi Chikamori | 2019-02-26 |