Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395961 | Posture changing device | — | 2019-08-27 |
| 10395962 | Substrate arrangement apparatus and substrate arrangement method | — | 2019-08-27 |
| 10229848 | Substrate alignment apparatus, substrate processing apparatus, substrate arrangement apparatus, substrate alignment method, substrate processing method, and substrate arrangement method | — | 2019-03-12 |