Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312115 | Substrate processing apparatus | — | 2019-06-04 |
| 10276407 | Substrate processing apparatus and substrate processing method | Kenji AMAHISA, Takeshi Yoshida | 2019-04-30 |
| 10211063 | Substrate processing apparatus and substrate processing method | Taiki HINODE, Takashi Ota, Kazuhide Saito, Yasukatsu Kamihiro | 2019-02-19 |
| 10204777 | Substrate processing apparatus and substrate processing method | — | 2019-02-12 |