Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475670 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2019-11-12 |
| 10249487 | Substrate processing method | Kenji Kobayashi, Naohiko YOSHIHARA | 2019-04-02 |