Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10464107 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Tomohiro UEMURA, Yuji Sugahara | 2019-11-05 |
| 10290511 | Substrate treatment apparatus and substrate treatment method | Hiroki Tsujikawa, Shotaro Tsuda, Seiji ANO | 2019-05-14 |