Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424483 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura, Shinichi Kato | 2019-09-24 |
| 10347512 | Method and apparatus for light-irradiation heat treatment | Hideaki Tanimura | 2019-07-09 |
| 10276385 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Shinichi Kato, Kenichi Yokouchi | 2019-04-30 |
| 10181404 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura, Shinichi Kato | 2019-01-15 |