Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424496 | Substrate treating method | Masafumi Inoue, Kurumi Yagi | 2019-09-24 |
| 10410887 | Substrate processing apparatus and substrate processing method | — | 2019-09-10 |
| 10199231 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata | 2019-02-05 |