Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410839 | Method of processing a substrate using an ion beam and apparatus for performing the same | Yil-hyung Lee, Jong Kyu Kim, Seok-Woo Nam, Jong Soon PARK, Kyoung-Sub Shin | 2019-09-10 |