Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460927 | Methods of fabricating a SiOCN layer using a first and second carbon precursor, the first carbon precursor being different from the second carbon precursor | Yong-Suk Tak, Tae Jong Lee, Bon-Young Koo, Ki-Yeon Park | 2019-10-29 |