Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10352964 | Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same | Jeong-Ju Park, Shi-Yong Yi, Eun-Sung Kim, Seung-chul Kwon, Sang Ouk Kim +1 more | 2019-07-16 |