Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10465290 | Substrate processing apparatus | Minjong Kim, Seonggil Park, Jaebeom PARK, Keeyoung Jun, Choongrae Cho +1 more | 2019-11-05 |
| 10184178 | Plasma-enhanced chemical vapor deposition (PE-CVD) apparatus and method of operating the same | Minjong Kim, Jang-Hee Lee, Jongwon Hong | 2019-01-22 |