Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10413946 | Furnace-type semiconductor apparatus, method of cleaning the same, and method of forming thin film using the same | Youngil Kwon, Giduck Kweon, Jong Il Park, Inwoo Seo, Wooksung Son | 2019-09-17 |