Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438810 | Method of forming photoresist pattern and method of fabricating semiconductor device using the same | Cha-Won Koh, Hyun-Woo Kim, Jin-Kyu Han | 2019-10-08 |
| 10353290 | Photoresist composition for extreme ultraviolet and method of forming photoresist pattern using the same | Chawon Koh, Hyunwoo KIM, Sang-Yoon Woo, Hyejin JEON | 2019-07-16 |