Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497534 | Aperture system of electron beam apparatus, electron beam exposure apparatus, and electron beam exposure apparatus system | Hyun Ho Lee, Jong Mun Park, Jin Choi, Shuichi Tamamushi | 2019-12-03 |