Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274825 | Acid generator compounds and photoresists comprising same | — | 2019-04-30 |
| 10248020 | Acid generators and photoresists comprising same | James W. Thackeray, James F. Cameron | 2019-04-02 |
| 10186424 | Silicon-based hardmask | Suzanne M. Coley, Shintaro Yamada, Cecilia W. Kiarie, Li Cui, Bhooshan Popere | 2019-01-22 |
| 10179778 | Substituted aryl onium materials | — | 2019-01-15 |