Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466588 | Sulfonyl photoacid generators and photoresists comprising same | Cong Liu | 2019-11-05 |
| 10359698 | Compositions comprising hetero-substituted carbocyclic aryl component and processes for photolithography | Deyan Wang, George G. Barclay | 2019-07-23 |
| 10221131 | Acid generator compounds and photoresists comprising same | Irvinder Kaur, Cong Liu | 2019-03-05 |
| 10222699 | Compositions and processes for immersion lithography | Deyan Wang, George G. Barclay | 2019-03-05 |
| 10197918 | Photoresist topcoat compositions and methods of processing photoresist compositions | Cong Liu, Doris Kang, Deyan Wang, Mingqi Li, Irvinder Kaur | 2019-02-05 |