Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10384932 | Device including micromechanical components in cavities having different pressures and method for its manufacture | Achim Breitling, Jan-Peter Stadler, Jochen Reinmuth | 2019-08-20 |
| 10294095 | Micromechanical sensor and method for producing a micromechanical sensor | Benny Pekka Herzogenrath | 2019-05-21 |
| 10215772 | Micromechanical structure for an acceleration sensor | — | 2019-02-26 |