Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10427937 | Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component | Christian Zielke, Hans Artmann, Oliver Breitschaedel, Peter Borwin Staffeld | 2019-10-01 |