Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10317211 | Robust inertial sensors | Bongsang Kim, Ando Feyh, Gary O'Brien, Michael Baus, Ralf Maier +1 more | 2019-06-11 |
| 10183857 | MEMS pressure sensor with multiple membrane electrodes | Ando Feyh, Bernhard Gehl | 2019-01-22 |
| 10184910 | Combined pressure and humidity sensor | Gerhard Lammel, Sibylle Waffenschmidt, Ando Feyh, Gary O'Brien | 2019-01-22 |
| 10173887 | Epi-poly etch stop for out of plane spacer defined electrode | Gary Yama, Gary O'Brien | 2019-01-08 |
| 10175188 | Trench based capacitive humidity sensor | Gary O'Brien, Ando Feyh, Ashwin Samarao, Gary Yama | 2019-01-08 |