Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381241 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Noriaki MICHITA | 2019-08-13 |
| 10290494 | Method of manufacturing semiconductor device and method of processing substrate | Masanao Fukuda, Takafumi Sasaki | 2019-05-14 |