Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170343 | Post-CMP cleaning apparatus and method with brush self-cleaning function | Yu-Chen Wei, Chun-Jui Chu, Jen-Chieh LAI, Shih-Ho Lin | 2019-01-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170343 | Post-CMP cleaning apparatus and method with brush self-cleaning function | Yu-Chen Wei, Chun-Jui Chu, Jen-Chieh LAI, Shih-Ho Lin | 2019-01-01 |