Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379447 | Method and apparatus for simulation of lithography overlay | — | 2019-08-13 |
| 10310490 | Method and apparatus of evaluating a semiconductor manufacturing process | Stefan Buhl, Martin Rößiger | 2019-06-04 |
| 10295914 | Method and apparatus for fabricating wafer by calculating process correction parameters | — | 2019-05-21 |
| 10234401 | Method of manufacturing semiconductor devices by using sampling plans | Stefan Buhl, Martin Roeßiger, Georg Erley | 2019-03-19 |