Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494718 | Deposition reactor with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2019-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494718 | Deposition reactor with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2019-12-03 |