Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229814 | Plasma processing apparatus | Hiroshi Kawaura, Tetsuya Yukimoto | 2019-03-12 |
| 10181406 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Satoshi SUEMASU | 2019-01-15 |