Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381196 | Charged particle beam writing apparatus and method for calculating irradiation coefficient | — | 2019-08-13 |
| 10234493 | Wireless module, electronic module, and measuring method | Masahiro Yanagi, Kimihiro Maruyama, Tatsushi Shibuya | 2019-03-19 |