Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373798 | Multi charged particle beam inspection apparatus, and multi charged particle beam inspection method | — | 2019-08-06 |
| 10345724 | Position correction method of stage mechanism and charged particle beam lithography apparatus | Rieko Nishimura | 2019-07-09 |