Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488760 | Method for acquiring parameter for dose correction of charged particle beam, charged particle beam writing method, and charged particle beam writing apparatus | — | 2019-11-26 |
| 10460909 | Charged particle beam writing method and charged particle beam writing apparatus | — | 2019-10-29 |