Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10184169 | Method for supplying deposition material, method for producing substrate, control device and deposition device | Tetsuya Goto, Nobuyuki Shigeoka | 2019-01-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10184169 | Method for supplying deposition material, method for producing substrate, control device and deposition device | Tetsuya Goto, Nobuyuki Shigeoka | 2019-01-22 |