Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508174 | Silicon-containing coating agent for reversing planarization pattern | Shuhei Shigaki, Makoto Nakajima | 2019-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508174 | Silicon-containing coating agent for reversing planarization pattern | Shuhei Shigaki, Makoto Nakajima | 2019-12-17 |