Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520834 | Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object | — | 2019-12-31 |
| 10514616 | Movable body apparatus, exposure apparatus and device manufacturing method | — | 2019-12-24 |
| 10409176 | Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method | — | 2019-09-10 |
| 10228625 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Hiroshi Shirasu, Yoshihiko Kudo | 2019-03-12 |