Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444643 | Lithographic thermal distortion compensation with the use of machine learning | Fardad Hashemi, Henry Pang | 2019-10-15 |
| 10371920 | Mirror assembly with heat transfer mechanism | Christopher S. Margeson | 2019-08-06 |
| 10259104 | Precision clamp | Fardad Hashemi, Patrick Shih Chang | 2019-04-16 |