Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222708 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2019-03-05 |
| 10209623 | Exposure apparatus, exposure method, and method for producing device | Takahiro Masada, Yuho Kanaya, Tadashi Nagayama | 2019-02-19 |