Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522370 | Substrate processing apparatus | Sang Hyun Park, Jung-Jae Kim | 2019-12-31 |
| 10423070 | Substrate treating method | Masashi Kanaoka, Masanori IMAMURA, Taiji Matsu, Hidetoshi Sagawa, Atsushi Tanaka +3 more | 2019-09-24 |