Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209622 | Exposure method and device manufacturing method having lower scanning speed to expose peripheral shot area | — | 2019-02-19 |
| 10203608 | Exposure apparatus and device manufacturing method having lower scanning speed to expose peripheral shot area | — | 2019-02-12 |
| 10203614 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2019-02-12 |
| 10180632 | Exposure apparatus, exposure method, and method for producing device | — | 2019-01-15 |