Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483212 | Apparatus for stacking substrates and method for the same | Isao Sugaya, Kazuya Okamoto, Minoru Fukuda | 2019-11-19 |
| 10424557 | Substrate bonding apparatus and substrate bonding method | Isao Sugaya, Minoru Fukuda | 2019-09-24 |