Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444642 | Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method | — | 2019-10-15 |
| 10268121 | Exposure apparatus and exposure method, and flat panel display manufacturing method | Takashi Shibuya | 2019-04-23 |