Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488763 | Pattern-edge placement predictor and monitor for lithographic exposure tool | — | 2019-11-26 |
| 10345715 | Pattern-edge placement predictor and monitor for lithographic exposure tool | — | 2019-07-09 |
| 10234756 | Scanner based optical proximity correction system and method of use | Raluca Popescu, Tomoyuki Matsuyama | 2019-03-19 |