Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483136 | Ceramic heater and electrostatic chuck | Naoya Uemura, Kohei Yamamoto | 2019-11-19 |
| 10354904 | Electrostatic chuck | Keisuke Okugawa, Toshihisa Nomura | 2019-07-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483136 | Ceramic heater and electrostatic chuck | Naoya Uemura, Kohei Yamamoto | 2019-11-19 |
| 10354904 | Electrostatic chuck | Keisuke Okugawa, Toshihisa Nomura | 2019-07-16 |